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Proceedings Paper

Laser Interferometer Measurement Systems For Machine Tool Industry And Microelectronics
Author(s): F. Petru; B. Popela; A. Stejskal; J. Krsek
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Paper Abstract

The article describes the laser interference measuring systems for machine-tool industry and microelectronics. They work on the Michelson interferometer principle with a single-frequency laser. The system for machine-tool industry measures lengths with the resolution of O,1 um, velocities, small angles, straightness and flatness. The system for microelectronics measures position in two orthogonal coordinates with the resolution of 40 nm.

Paper Details

Date Published: 18 January 1985
PDF: 4 pages
Proc. SPIE 0473, Symposium Optika '84, (18 January 1985); doi: 10.1117/12.942411
Show Author Affiliations
F. Petru, Institute of Scientific Instruments of the Czechoslovak Academy of Sciences (Czechoslovakia)
B. Popela, Institute of Scientific Instruments of the Czechoslovak Academy of Sciences (Czechoslovakia)
A. Stejskal, Institute of Scientific Instruments of the Czechoslovak Academy of Sciences (Czechoslovakia)
J. Krsek, Institute of Scientific Instruments of the Czechoslovak Academy of Sciences (Czechoslovakia)


Published in SPIE Proceedings Vol. 0473:
Symposium Optika '84
Gabor Lupkovics; Andras Podmaniczky, Editor(s)

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