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Proceedings Paper

Analysis Of The Energy Broadening Of Liquid Metal Ion Sources
Author(s): M A Gesley; D L Larson; L W Swanson; C H Hinrichs
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Paper Abstract

The increase in the beam energy spread <AE> of liquid metal ion sources with particle mass (rn) and current (I) is analyzed in terms of the pairwise coulomb interactions of particles emitted from a spherical emitter according to Poisson statistics. According to model calculations <AE> cc m1/4 11/2 which agrees with experimental results. In addition, a shift in the average energy of the particles due to the mutual interactions is predicted by the model calculations.

Paper Details

Date Published: 18 June 1984
PDF: 9 pages
Proc. SPIE 0471, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III, (18 June 1984); doi: 10.1117/12.942325
Show Author Affiliations
M A Gesley, Oregon Graduate Center (United States)
D L Larson, Oregon Graduate Center (United States)
L W Swanson, Oregon Graduate Center (United States)
C H Hinrichs, Linfield College (United States)


Published in SPIE Proceedings Vol. 0471:
Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies III
Alfred Wagner, Editor(s)

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