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Proceedings Paper

Picosecond Pulse Response From Hydrogenated Amorphous Silicon (A-Si:H) Optical Detectors On Channel Waveguides
Author(s): Donald R. Larson; Robert J. Phelan
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Paper Abstract

We have fabricated high speed optical detectors on channel waveguides formed by both potassium ion-exchange in glass and titanium diffusion in lithium niobate. These new waveguide detectors show response times of 200 ps full width at half maximum amplitude (FWHM) when illuminated with subpicosecond optical pulses. The detectors consist of back-to-back Schottky photodiodes formed by chromium-gold metal contacts on hydrogenated amorphous silicon (a-Si:H). When interdigitated metal contacts with the contact separation and semiconductor film thickness dimensions close to one micrometer are used, the detectors are both fast and efficient.

Paper Details

Date Published: 10 March 1988
PDF: 7 pages
Proc. SPIE 0835, Integrated Optical Circuit Engineering V, (10 March 1988); doi: 10.1117/12.942324
Show Author Affiliations
Donald R. Larson, National Bureau of Standards (United States)
Robert J. Phelan, National Bureau of Standards (United States)

Published in SPIE Proceedings Vol. 0835:
Integrated Optical Circuit Engineering V
Mark A. Mentzer, Editor(s)

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