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Proceedings Paper

Propagation Losses Of Thin Film Waveguides
Author(s): M. D. Himel; J. A. Ruffner; U. J. Gibson
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Paper Abstract

Propagation losses of ZnS thin film waveguides have been investigated. The effects of oxygen and water backpressures during the deposition of ZnS thin films on waveguide performance and microstructure have been observed. These effects dominated losses caused by surface finish. A decrease in losses, and a change in preferential crystal orientation from (111) faces parallel to the substrate to (220) was observed for increased H2O partial pressures. Increasing 02 partial pressure resulted in lower waveguide losses possibly from attachment to unbonded Zn and void filling. Because waveguide scattering losses are Rayleigh-like, a quadratic dependence on crystallite grain size is expected. (220) oriented crystallites had smaller grain sizes than the (111) and overall lower losses.

Paper Details

Date Published: 10 March 1988
PDF: 8 pages
Proc. SPIE 0835, Integrated Optical Circuit Engineering V, (10 March 1988); doi: 10.1117/12.942314
Show Author Affiliations
M. D. Himel, University of Arizona (United States)
J. A. Ruffner, University of Arizona (United States)
U. J. Gibson, University of Arizona (United States)

Published in SPIE Proceedings Vol. 0835:
Integrated Optical Circuit Engineering V
Mark A. Mentzer, Editor(s)

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