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Proceedings Paper

A Comparison Between Measured Surface Microtopography And Observed Scattering In The Extreme Ultraviolet
Author(s): James Green; Sharon Jelinsky; Stuart Bowyer; Roger F. Malina
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Paper Abstract

We present comparative measurements of surface roughness on prepared samples. These measurements have been made with both Talystep profilometers and WYKO interferometers. In addition, we have measured scattering distribution from these samples at extreme ultra-violet wavelengths. The utility of the WYKO interferometer and Talystep device for specifying extreme ultraviolet mirror surface quality is discussed.

Paper Details

Date Published: 9 August 1988
PDF: 2 pages
Proc. SPIE 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications, (9 August 1988); doi: 10.1117/12.942162
Show Author Affiliations
James Green, University of California (United States)
Sharon Jelinsky, University of California (United States)
Stuart Bowyer, University of California (United States)
Roger F. Malina, University of California (United States)

Published in SPIE Proceedings Vol. 0830:
Grazing Incidence Optics for Astronomical and Laboratory Applications
C. Stuart Bowyer, Editor(s)

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