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Proceedings Paper

An Analysis Of Pellicle Parameters For Step-And-Repeat Projection
Author(s): Alex Flamholz
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Paper Abstract

Pellicles are thin transparent membranes of high optical quality that are placed on one or both sides of an IC circuit mask to protect the mask and to prevent any particulate defect falling onto the mask from affecting the printed image [1]. Pellicles have been successfully utilized in production with 1:1 scanning systems and have given measureable improvements in yield [2].

Paper Details

Date Published: 29 June 1984
PDF: 9 pages
Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); doi: 10.1117/12.941903
Show Author Affiliations
Alex Flamholz, IBM General Technology Division (United States)

Published in SPIE Proceedings Vol. 0470:
Optical Microlithography III: Technology for the Next Decade
Harry L. Stover, Editor(s)

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