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Proceedings Paper

VHSIC - A Test Bed For Advanced Lithography
Author(s): Egbert D Maynard
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Paper Abstract

The VHSIC program is, by now, quite well known to many of you. I would like, however, to take a few minutes to review both the origins and the current status of the VHSIC program and particularly those areas which relate to high resolution, high throughput lithography for submicron silicon integrated circuits.

Paper Details

Date Published: 29 June 1984
PDF: 20 pages
Proc. SPIE 0470, Optical Microlithography III: Technology for the Next Decade, (29 June 1984); doi: 10.1117/12.941876
Show Author Affiliations
Egbert D Maynard, U.S. Dept of Defense (United States)

Published in SPIE Proceedings Vol. 0470:
Optical Microlithography III: Technology for the Next Decade
Harry L. Stover, Editor(s)

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