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Proceedings Paper

Angular Distributions In Thin-Film Deposition Simulations
Author(s): Brian J. Bartholomeusz
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Paper Abstract

A program was written to simulate the sputter deposition of amorphous rare earth-transition metal (RE-TM) thin films using a model based on the serial deposition of hard disks. Apart from permitting the simultaneous deposition of multi-component films, the model attempted to incorporate details of the deposition process by using realistic representations of the energy and trajectory distributions in the depositions stream. These were found to improve significantly the packing fraction of simulated films and reduced the pronounced columnar tilt observed in many previous simulations. A number of analytical techniques were employed which provided useful configurational information and some details of the short range ordering (SRO) of simulated films.

Paper Details

Date Published: 2 February 1988
PDF: 8 pages
Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941855
Show Author Affiliations
Brian J. Bartholomeusz, Eastman Kodak Company (United States)

Published in SPIE Proceedings Vol. 0821:
Modeling of Optical Thin Films
Michael Ray Jacobson, Editor(s)

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