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Proceedings Paper

Computer Simulation Of Substrate Defect Propagation In Thin Films
Author(s): R. B. Sargent; Dar-Yuan Song; H. A. Macleod
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Paper Abstract

A thin-film growth simulation of the type first introduced by Henderson et. al.1 is applied to defect propagation in thin films. Film growth is simulated on substrates having sinusoidally varying surfaces. The surfaces of the simulated films are then characterized by their power spectrum and their correlation with the substrate surface. The effects of film thickness as well as substrate sinusoid variation period and amplitude are investigated.

Paper Details

Date Published: 2 February 1988
PDF: 19 pages
Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941851
Show Author Affiliations
R. B. Sargent, University of Arizona (United States)
Dar-Yuan Song, University of Arizona (United States)
H. A. Macleod, University of Arizona (United States)


Published in SPIE Proceedings Vol. 0821:
Modeling of Optical Thin Films
Michael Ray Jacobson, Editor(s)

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