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Proceedings Paper

Structure-Zone Models Of Thin Films
Author(s): John A. Thornton
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Paper Abstract

Structure zone models based on examinations of thin films using optical and scanning microcopy have provided useful guide-lines in categorizing general regimes of film growth behavior. However, many observations have been made since the original zone model for evaporated coatings was proposed by Movchan and Demichishin in 1962 and extended to magnetron sputtering in 1974. The purpose of this paper is to revisit the structure zone models and their physical interpretation in the light of recent experimental and computer simulation observations.

Paper Details

Date Published: 2 February 1988
PDF: 11 pages
Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941846
Show Author Affiliations
John A. Thornton, University of Illinois (United States)


Published in SPIE Proceedings Vol. 0821:
Modeling of Optical Thin Films
Michael Ray Jacobson, Editor(s)

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