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Proceedings Paper

Computer Simulation Of The Cross-Sectional Morphology Of Thin Films
Author(s): Bangyi Yang; Barbara L. Walden; Russell Messier; William B. White
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Paper Abstract

Two macroscopic two-dimensional geometrical models have been developed to describe the cross-sectional morphology of thin films which exhibit columnar microstructure. Using simple geometrical assumptions and assumptions based on experimental results, these models trace the evolution of cone-like clusters from their point of nucleation within the film to their emergence at the top surface. The simulated films are then characterized by calculating their roughness as a function of film thickness for different input parameters.

Paper Details

Date Published: 2 February 1988
PDF: 9 pages
Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941843
Show Author Affiliations
Bangyi Yang, The Pennsylvania State University (United States)
Barbara L. Walden, The Pennsylvania State University (United States)
Russell Messier, The Pennsylvania State University (United States)
William B. White, The Pennsylvania State University (United States)


Published in SPIE Proceedings Vol. 0821:
Modeling of Optical Thin Films
Michael Ray Jacobson, Editor(s)

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