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Proceedings Paper

Invited Paper Models For Microstructure Evolution During Optical Thin Film Growth
Author(s): K. H. Muller
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Paper Abstract

In this study several recently developed theoretical models will be reported which help to understand some of the fundamental processes which occur at an atomic level during thin film growth. A simple stochastic lattice-gas model has been employed to reveal substrate temperature effects on columnar microstructure. Molecular-dynamics studies have been performed in order to elucidate the adatom-surface interaction and to simulate vapor, sputter and ion-assisted deposition. A collision cascade model for ion-assisted optical films has also been used and explains quantitatively the experimentally observed densification of optical films.

Paper Details

Date Published: 2 February 1988
PDF: 9 pages
Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941840
Show Author Affiliations
K. H. Muller, CSIRO Division of Applied Physics (Australia)


Published in SPIE Proceedings Vol. 0821:
Modeling of Optical Thin Films
Michael Ray Jacobson, Editor(s)

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