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Proceedings Paper

Computer Simulation Of The Nucleation And Growth Of Optical Coatings
Author(s): Brian J. Bartholomeusz; Karl-Heinz Muller; Michael Ray Jacobson
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Paper Abstract

Comprehensive computer experiments have been performed on various aspects of thin film deposition and growth in attempts to bridge the gap between theoretical predictions and experimental observations and to facilitate the development a realistic model for predictive purposes. The results enhance our understanding of the underlying physical processes and provide a vehicle for demonstrating relationships between fabrication conditions and subsequent film properties. Ultimately, we hope that this understanding will improve process reproducibility and promote our ability to produce desirable film properties. This paper comprehensively surveys the modeling of amorphous solids and, in the course of examining prior simulations of thin film deposition and growth, identifies areas that warrant particular attention.

Paper Details

Date Published: 2 February 1988
PDF: 34 pages
Proc. SPIE 0821, Modeling of Optical Thin Films, (2 February 1988); doi: 10.1117/12.941839
Show Author Affiliations
Brian J. Bartholomeusz, Eastman Kodak Company (United States)
Karl-Heinz Muller, Commonwealth Scientific and Industrial Research Organisation (Australia)
Michael Ray Jacobson, University of Arizona (United States)

Published in SPIE Proceedings Vol. 0821:
Modeling of Optical Thin Films
Michael Ray Jacobson, Editor(s)

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