Proceedings PaperWyko Systems For Optical Metrology
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WYKO produces interferometer systems for a number of optical metrology applications. Systems to be discussed include: WISP, an interferogram analysis package that uses input from a graphics digitizing tablet or video camera; TOPO, a microscope system for profiling surfaces such as mirrors, hard disks, magnetic tape, and paint; SIRIS, used to test optical components ranging in size from a millimeter to meters; IR3, a 10.6 μm Twyman-Green interferometer for testing up to 16-in, diameter objects; LADITE, a wavefront analysis system whose major application is the testing of diode lasers; HOLOCAM, for quantitative holographic interferometry; and MAX, a projected fringe contouring system. All products but WISP use phase-measurement interferometry principles to obtain data. This paper gives the general operational principles of these systems and describes some of their applications and results.