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Proceedings Paper

Surface Measurements With A Non-Contact Nomarski-Profiling Instrument
Author(s): Thomas C. Bristow; Dag Lindquist
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Paper Abstract

This paper presents measurements of surface features from a variety of surfaces using a non-contact, long scan surface profiler. Data is presented emphasizing the waviness and roughness of the surface. Several different types of samples are presented, including the surface of a diamond turned mirror, computer hard disk, machine tool surface, and film. The instrument used for these measurements has a resolution of 1 Angstrom and has a scan length up to 100 millimeters.

Paper Details

Date Published: 23 March 1987
PDF: 5 pages
Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); doi: 10.1117/12.941759
Show Author Affiliations
Thomas C. Bristow, Photographic Sciences Corporation (United States)
Dag Lindquist, Photographic Sciences Corporation (United States)


Published in SPIE Proceedings Vol. 0816:
Interferometric Metrology
Norbert A. Massie, Editor(s)

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