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Proceedings Paper

Recent Advances In Interferometry At Zygo
Author(s): R. A. Smythe; J. A. Soobitsky; B. E. Truax
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Paper Abstract

This paper will discuss some of the recent advances in the field of interferometry that have been made at Zygo. In the past year Zygo has introduced five major advances in the interferometry field: the 5500 Heterodyne Profiler, the AXIOM 2/20 distance measuring interferometer, a 450mm phase modulator for large aperture phase interferometry, a phase measuring interferometer at 351nrn and the Mark IV programmable phase measuring interferometer. The presentation will conclude with a general discussion of what Zygo sees for the future of interferometry.

Paper Details

Date Published: 23 March 1987
PDF: 11 pages
Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); doi: 10.1117/12.941758
Show Author Affiliations
R. A. Smythe, Zygo Corporation (United States)
J. A. Soobitsky, Zygo Corporation (United States)
B. E. Truax, Zygo Corporation (United States)

Published in SPIE Proceedings Vol. 0816:
Interferometric Metrology
Norbert A. Massie, Editor(s)

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