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Proceedings Paper

Accuracy Analysis And Improvements To The Hewlett-Packard Laser Interferometer System
Author(s): C. Steinmetz; R. Burgoon; J. Herris
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Paper Abstract

An account is given on how to analyze the measurement accuracy of a laser interferometer system. Each component of the system accuracy budget is discussed, including the magnitude of these components. Two important components of this budget; atmospheric affects and optics thermal drift are discussed in more detail. The effects of these two error components have been significantly reduced on the Hewlett-Packard laser interferometer systems by the use of Wavelength Tracking Compensation and a new interferometer.

Paper Details

Date Published: 23 March 1987
PDF: 16 pages
Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); doi: 10.1117/12.941757
Show Author Affiliations
C. Steinmetz, Hewlett-Packard Company (United States)
R. Burgoon, Hewlett-Packard Company (United States)
J. Herris, Hewlett-Packard Company (United States)

Published in SPIE Proceedings Vol. 0816:
Interferometric Metrology
Norbert A. Massie, Editor(s)

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