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Proceedings Paper

Interferometric Metrology: Current Trends And Future Prospects
Author(s): P. Hariharan
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Paper Abstract

Interferometric metrology is now experiencing a major resurgence of interest due to several new developments. This paper presents an overview of current trends and a brief discussion of future prospects.

Paper Details

Date Published: 23 March 1987
PDF: 17 pages
Proc. SPIE 0816, Interferometric Metrology, (23 March 1987); doi: 10.1117/12.941752
Show Author Affiliations
P. Hariharan, CSIRO Division of Applied Physics (Australia)

Published in SPIE Proceedings Vol. 0816:
Interferometric Metrology
Norbert A. Massie, Editor(s)

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