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Proceedings Paper

Observation Of Grating Surfaces By The Use Of STM
Author(s): Takanori Oshio; Yoshiyuki Sakai; Shaw Ehara
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Paper Abstract

The surfaces of several optical gratings have been observed by a scanning tunneling microscope (STM) in the atomosphere without contacting surface. Blaze angles of optical gratings with 3600 lines/mm and 1200 lines/mm have been measured. It is proved that the scanning tunneling microscopy is one of the useful techniques for topographic mapping of gratings with very fine pitches.

Paper Details

Date Published: 9 February 1987
PDF: 4 pages
Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941743
Show Author Affiliations
Takanori Oshio, Ashiya University (Japan)
Yoshiyuki Sakai, Ashiya University (Japan)
Shaw Ehara, Sharp Corp. (Japan)


Published in SPIE Proceedings Vol. 0815:
Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III
Jeremy M. Lerner, Editor(s)

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