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Proceedings Paper

Groove Profile Measurement Of Diffraction Gratings Using Scanning Electron Microscope
Author(s): Tatsuo Herada; Eideki Taira; Toshiaki Kita; Masaaki Itou
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Paper Abstract

A method for measuring diffraction preting groove profiles using a scanning electron microscope is developed. The method is to observe a photoresist well that is straight and normal to the grating grooves. It is formed by using photolithography technology for seticonductor device fabrication. Several types of diffraction gratings are ruled by applying this measurement technology to help control the groove profiles, especially of those with extremely fine and shallow grooves.

Paper Details

Date Published: 9 February 1987
PDF: 6 pages
Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941742
Show Author Affiliations
Tatsuo Herada, Hitachi, Ltd. (Japan)
Eideki Taira, Hitachi, Ltd. (Japan)
Toshiaki Kita, Hitachi, Ltd. (Japan)
Masaaki Itou, Hitachi, Ltd. (Japan)


Published in SPIE Proceedings Vol. 0815:
Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III
Jeremy M. Lerner, Editor(s)

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