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Proceedings Paper

A Novel Concept For Fabrication Of Submicron Geometry Holographic Gratings
Author(s): Edward J. Gratrix
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Paper Abstract

Accurate submicron holographic diffraction gratings are fabricated by utilizing the total internal reflection inside a right angle prism. The AlGaAs wafers are coated with photoresist and optically contacted to one face of the prism. Collimated laser radiation entering the hypotenuse of the prism is folded onto itself and interferes in the photoresist. The period of the resulting grating can be tuned by rotating the prism about the axis defined by the apex. This roof configuration not only allows for easy alignment but dictates that both beams interfere at equal and opposing angles with identical intensities. The effects of vibration are limited to rotations about the apex of the prism.

Paper Details

Date Published: 9 February 1987
PDF: 5 pages
Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941741
Show Author Affiliations
Edward J. Gratrix, The Perkin-Elmer Corporation (United States)


Published in SPIE Proceedings Vol. 0815:
Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III
Jeremy M. Lerner, Editor(s)

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