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Proceedings Paper

Micromachined Silicon Periodic Structures For Millimeter- And Submillimeter-Wave Applications
Author(s): L. J. Cheng; G. T. Crotty; J. Farhoomand; K. M. Koliwad; H. M. Pickett
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Paper Abstract

The feasibility of fabricating periodic structures using silicon micromachining for millimeter-and submillimeter-wave applications is investigated. Diffraction gratings and dichroic filters are fabricated and tested.

Paper Details

Date Published: 9 February 1987
PDF: 5 pages
Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941740
Show Author Affiliations
L. J. Cheng, California Institute of Technology (United States)
G. T. Crotty, California Institute of Technology (United States)
J. Farhoomand, California Institute of Technology (United States)
K. M. Koliwad, California Institute of Technology (United States)
H. M. Pickett, California Institute of Technology (United States)


Published in SPIE Proceedings Vol. 0815:
Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III
Jeremy M. Lerner, Editor(s)

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