Share Email Print
cover

Proceedings Paper

Large Diffraction Grating Ruling Engine With Nanometer Digital Control System
Author(s): Erwin G. Loewen; Robert S. Wiley; Geoffrey Portas
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Modifications to the MIT-B grating ruling engine have recently been installed. In addition to a new ultra-quiet mechanical drive system for the diamond carriage an entirely new digital servo control system has been installed. It operates with a bit size of 0.09 nm, with virtually infinite control levels. Rowland ghost levels are no longer detectable, which implies that periodic error amplitudes are below 0.5 nm.

Paper Details

Date Published: 9 February 1987
PDF: 8 pages
Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); doi: 10.1117/12.941737
Show Author Affiliations
Erwin G. Loewen, Milton Roy Company (United States)
Robert S. Wiley, Milton Roy Company (United States)
Geoffrey Portas, Cranfield Unit for Precision Engineering (England)


Published in SPIE Proceedings Vol. 0815:
Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III
Jeremy M. Lerner, Editor(s)

© SPIE. Terms of Use
Back to Top