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Proceedings Paper

High Resolution Triangulation Based Range Sensing For Metrology
Author(s): Jeffrey A. Jalkio; John E. Bolkcom; Steven K. Case
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Paper Abstract

Triangulation based range sensors have long been used for making large scale measurements, however, when triangulation techniques are used in metrology applications with very tight tolerances, new concerns appear. In particular, the design of very high resolution range sensors requires an understanding of surface microstructure effects that can severely limit the accuracy of a system. For triangulation based sensors to enter the regime where interferometry has traditionally been used, the problems of surface microstructure induced noise must be overcome. In this paper we discuss the factors that limit the resolution of triangulation based range sensors, and the theoretical limitations on the accuracy of such sensors.

Paper Details

Date Published: 17 February 1987
PDF: 5 pages
Proc. SPIE 0814, Photomechanics and Speckle Metrology, (17 February 1987); doi: 10.1117/12.941700
Show Author Affiliations
Jeffrey A. Jalkio, CyberOptics Corporation (United States)
John E. Bolkcom, CyberOptics Corporation (United States)
Steven K. Case, CyberOptics Corporation (United States)


Published in SPIE Proceedings Vol. 0814:
Photomechanics and Speckle Metrology
Fu-Pen Chiang, Editor(s)

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