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Proceedings Paper

Silicon Multifiber Connector And Multifiber Splicing - Two Possibilities For Quick And Simple Connection Of A Large Number Of Fibers
Author(s): Rudolf Sammueller
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Paper Abstract

The precision made parts of the multifiber connectors are made of silicon. Silicon is a material which has become very important in the last decades. It is particulary well known in semi-conductor technology, in which a great number of microelectronic components are produced from silicon. However not only microelectronic components may be made from silicon, but also the most minute mechanical components. The basic material of the Silicon-Multifiber-Connector (S.M.C.) is single crystal silicon in wafer form. These discs are 0.5 mm thick and are coated with an oxide layer onto which a photoresist has been deposited. Through a photomask, on which all the patterns of the S.M.C. are mapped, the photoresist is exposed to ultraviolet radiation. Thereby a chemical reaction takes place, resulting in the unexposed areas, necessary for producing the precision etching mask from the oxide layer. The wafers for the S.M.C. are <100> oriented. If this silicon is treated with an anisotropic etchant (e.g. KOH, NaOH), then due to an opening in the oxide layer, a corresponding V-shaped depression is created.

Paper Details

Date Published: 15 August 1984
PDF: 9 pages
Proc. SPIE 0468, Fibre Optics '84, (15 August 1984); doi: 10.1117/12.941636
Show Author Affiliations
Rudolf Sammueller, Siemens AG (Germany)


Published in SPIE Proceedings Vol. 0468:
Fibre Optics '84

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