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Proceedings Paper

Application Of Confocal Beam Scanning Microscopy To The Measurement Of Submicron Structures
Author(s): Roelof W. Wijnaendts-van-Resandt; Ch. Ihrig
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Paper Abstract

Confocal laser microscopy extends the applicability of optical methods to sub-micron structure measurements. A beam scanning system developed by Heidelberg Instruments GmbH is presented. The contribution includes a detailed comparison between beam scanning and object scanning microscopes. A number of practical applications of the beam scanning system in the field of biology and integrated circuit metrology are presented.

Paper Details

Date Published: 3 August 1987
PDF: 6 pages
Proc. SPIE 0809, Scanning Imaging Technology, (3 August 1987); doi: 10.1117/12.941504
Show Author Affiliations
Roelof W. Wijnaendts-van-Resandt, Heidelberg Instruments GmbH (Germany)
Ch. Ihrig, Heidelberg Instruments GmbH (Germany)

Published in SPIE Proceedings Vol. 0809:
Scanning Imaging Technology
Ludwig J. Balk; Tony Wilson, Editor(s)

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