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Proceedings Paper

Industrial Applications Of Confocal Scanning Optical Microscopy
Author(s): Andrew J. Dixon; Nick Doe; Tia-Min Pang
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Paper Abstract

The confocal scanning optical microscope exploits three unique capabilities of a point probing light scanning system: differential phase contrast, confocal sectioning and optical beam induced current (OBIC) imaging. Applications of these capabilities in materials microscopy, semiconductor failure analysis and biological microscopy are described. The design considerations of the Lasersharp scanning confocal microscope are outlined.

Paper Details

Date Published: 3 August 1987
PDF: 8 pages
Proc. SPIE 0809, Scanning Imaging Technology, (3 August 1987); doi: 10.1117/12.941493
Show Author Affiliations
Andrew J. Dixon, Bio -Rad Lasersharp Ltd. (U.K.)
Nick Doe, Bio -Rad Lasersharp Ltd. (U.K.)
Tia-Min Pang, Bio -Rad Lasersharp Ltd. (U.K.)


Published in SPIE Proceedings Vol. 0809:
Scanning Imaging Technology
Ludwig J. Balk; Tony Wilson, Editor(s)

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