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Proceedings Paper

Operation And Application Of Scanning Optical Microscopy In An SEM (SOMSEM)
Author(s): F. Battistella; A. J. Mackintosh; P. J. Wright
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Paper Abstract

An inexpensive device which enables Scanning Optical Microscopy to be undertaken in an SEM is described. This equipment (SOMSEM) is outlined, and its use is demonstrated by the presentation of results obtained by both O.B.I.C. and Reflective imaging modes.

Paper Details

Date Published: 3 August 1987
PDF: 6 pages
Proc. SPIE 0809, Scanning Imaging Technology, (3 August 1987); doi: 10.1117/12.941490
Show Author Affiliations
F. Battistella, University of Cambridge (UK.)
A. J. Mackintosh, Oxford Instruments Ltd (UK.)
P. J. Wright, Oxford Instruments Ltd (UK.)

Published in SPIE Proceedings Vol. 0809:
Scanning Imaging Technology
Ludwig J. Balk; Tony Wilson, Editor(s)

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