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Proceedings Paper

A Scanning-Spot Interferometer For Measuring Steep Aspherical Surfaces
Author(s): W. G. Ophey
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Paper Abstract

The shape of an aspherical surface can optically be measured by focusing a small light spot on its surface. Scanning in a line across the surface and going through the apex of the surface, one can interferometrically detect its shape. This paper describes the performance and limitations of such a scanning-spot interferometer. Special attention is paid to the ability to measure very steep aspherical surfaces.

Paper Details

Date Published: 28 September 1987
PDF: 5 pages
Proc. SPIE 0805, Optical Components and Systems, (28 September 1987); doi: 10.1117/12.941377
Show Author Affiliations
W. G. Ophey, Philips Research Laboratories (The Netherlands)


Published in SPIE Proceedings Vol. 0805:
Optical Components and Systems
Andre Masson, Editor(s)

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