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Proceedings Paper

An Infinitely Stiff Very High Precision Actuator
Author(s): P. D. Atherton; T. R. Hicks; N. K. Reay; R. C. Sidey
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Paper Abstract

The Digital Piezo Transducer (DPT) is a piezo-electric actuator incorporating a capacitance micrometer as an integrated position sensor. This internal micrometer has a positional resolution which is much better than a nanometer. The DPT is operated in a closed servo-loop incorporating an almost perfect integrator stage. As a result the DPT is extremely stiff and is capable of sub-nanometer resolution and stability. It has a response time of better than 1 millisecond and a maximum range of 120 um.

Paper Details

Date Published: 11 January 1987
PDF: 4 pages
Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); doi: 10.1117/12.941288
Show Author Affiliations
P. D. Atherton, Queensgate Instruments Ltd (UK)
T. R. Hicks, Queensgate Instruments Ltd (UK)
N. K. Reay, Queensgate Instruments Ltd (UK)
R. C. Sidey, Queensgate Instruments Ltd (UK)


Published in SPIE Proceedings Vol. 0803:
Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications
Manfred Weck, Editor(s)

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