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Proceedings Paper

Table Motion Systems
Author(s): T. Bispink; M. Weck
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Paper Abstract

Table motion systems of high precision machines combine several properties, such as very good displacement accuracy and repeatability, small straightness errors of slides and realization of constant velocities. According to these demands special elements are applied, for example high precision slide systems, linear drive systems and metrology systems. A survey about the properties of these elements will be given.

Paper Details

Date Published: 11 January 1987
PDF: 7 pages
Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); doi: 10.1117/12.941286
Show Author Affiliations
T. Bispink, Fraunhofer-Institut fur Produktionstechnologie (Germany)
M. Weck, Fraunhofer-Institut fur Produktionstechnologie (Germany)


Published in SPIE Proceedings Vol. 0803:
Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications
Manfred Weck, Editor(s)

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