Share Email Print
cover

Proceedings Paper

Mapping The Performance Of Surface-Measuring Instruments
Author(s): Margaret Stedman
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The performance of a dimensional surface-measuring instrument is usually limited by a small number of critical components or specifications. For example, parameters such as those specifying ranges and resolutions, and probe geometry are needed to define the capabilities of the instrument. The response of the instrument to sinusoidal perturbations of varying amplitude and wavelength, can be mapped in amplitude-wavelength space to show the effect of each parameter and the overall limits of performance.

Paper Details

Date Published: 11 January 1987
PDF: 6 pages
Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); doi: 10.1117/12.941285
Show Author Affiliations
Margaret Stedman, National Physical Laboratory (UK)


Published in SPIE Proceedings Vol. 0803:
Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications
Manfred Weck, Editor(s)

© SPIE. Terms of Use
Back to Top