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Proceedings Paper

Testing The Dynamic Behaviour Of Air-Bearing Machine Tools
Author(s): Rudiger Haberland
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Paper Abstract

Air bearing machine tools need dynamic testing for evaluation and qualification. To do this with low cost, high speed and sufficient accuracy three excitation possibilities: impuls, sinus and the process itself are outlined and five sensor possibilities (three types of accelerometers and two types of distance-sensors) are described together with the respective draw-backs. Typical results are presented.

Paper Details

Date Published: 11 January 1987
PDF: 7 pages
Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); doi: 10.1117/12.941281
Show Author Affiliations
Rudiger Haberland, Universitat Kaiserslautern (Germany)


Published in SPIE Proceedings Vol. 0803:
Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications
Manfred Weck, Editor(s)

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