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Proceedings Paper

Accuracy Limits And Potential Applications Of The LIGA Technique In Integrated Optics
Author(s): D. Munchmeyer; W. Ehrfeld
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Paper Abstract

By a combination of X-ray lithography, galvanoforming and molding processes, microstructures with lateral dimensions in the micrometer range, vertical dimensions of some hundred micrometers and submicrometer tolerances have been produced. An analysis of precision and surface quality achievable by this technique is given and design studies of various microoptical components are presented.

Paper Details

Date Published: 11 January 1987
PDF: 10 pages
Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); doi: 10.1117/12.941277
Show Author Affiliations
D. Munchmeyer, Institut fur Kernverfahrenstechnik (Federal Republic of Germany)
W. Ehrfeld, Institut fur Kernverfahrenstechnik (Federal Republic of Germany)


Published in SPIE Proceedings Vol. 0803:
Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications
Manfred Weck, Editor(s)

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