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Proceedings Paper

Computer Controlled Ion Beam Machining For Precision Surface Finishing And Figuring
Author(s): S. T. Davies; D. J. Whitehouse
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Paper Abstract

Micromachining of mechanical structures by ion bombardment is reported. A 1.5 kV argon ion beam is used under computer control for workpiece stock removal. Generation of profiles with submicron precision is demonstrated and computer algorithms are used to predict machining conditions for producing specific surface characteristics and evaluating them geometrically.

Paper Details

Date Published: 11 January 1987
PDF: 6 pages
Proc. SPIE 0803, Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications, (11 January 1987); doi: 10.1117/12.941273
Show Author Affiliations
S. T. Davies, University of Warwick (UK)
D. J. Whitehouse, University of Warwick (UK)


Published in SPIE Proceedings Vol. 0803:
Micromachining of Elements with Optical and Other Submicrometer Dimensional and Surface Specifications
Manfred Weck, Editor(s)

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