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Proceedings Paper

Invited Paper Plasma-Spectra In Materials Processing By Excimer Lasers
Author(s): R. Poprawe; M. Wehner; G. Brown; G. Herziger
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Paper Abstract

Materials processing utilizing excimer lasers is enjoying rapidly increasing interest due to the growing number of promising fields of application. Especially processes like ablation and micro-processing gain more and more attention. However, little is konwn about the mechanisms involved in the interaction of UV-radiation with matter and experimental data on process parameters such as ablation rate, wavelength, puls rate of operation etc. are not sufficient for controlled applications with high quality and reproducibility. Therefore plain and clear criteria have to be found in order to garantee the desired standard.

Paper Details

Date Published: 22 September 1987
PDF: 9 pages
Proc. SPIE 0801, High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics, (22 September 1987); doi: 10.1117/12.941241
Show Author Affiliations
R. Poprawe, Fraunhofer-Institut far Lasertechnik (United States)
M. Wehner, Fraunhofer-Institut far Lasertechnik (United States)
G. Brown, Fraunhofer-Institut far Lasertechnik (United States)
G. Herziger, Fraunhofer-Institut far Lasertechnik (United States)


Published in SPIE Proceedings Vol. 0801:
High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics
Ernst-Wolfgang Kreutz; A. Quenzer; Dieter Schuoecker, Editor(s)

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