Share Email Print
cover

Proceedings Paper

Excimer Laser Processing Of Thin Metallic Films On Dielectric Substrates
Author(s): U. Sowada; H. J. Kahlert; D. Basting
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In addition to the conventional use of metal coatings on glass for mirrors, the electrical and electronic industries have increasing demand for patterned metal films on polymer substrates.

Paper Details

Date Published: 22 September 1987
PDF: 7 pages
Proc. SPIE 0801, High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics, (22 September 1987); doi: 10.1117/12.941237
Show Author Affiliations
U. Sowada, Lambda Physik (Germany)
H. J. Kahlert, Lambda Physik (Germany)
D. Basting, Lambda Physik (Germany)


Published in SPIE Proceedings Vol. 0801:
High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics
Ernst-Wolfgang Kreutz; A. Quenzer; Dieter Schuoecker, Editor(s)

© SPIE. Terms of Use
Back to Top