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Proceedings Paper

Invited Paper Laser-Induced Surface Modification And Chemical Etching Of Materials
Author(s): M. Eyett; R. Kullmer; D. Bauerle
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Paper Abstract

Laser-induced surface modification and chemical etching of insulators, semiconductors and metals is reviewed. Special emphasis is placed on new results concerning the metallization and the etching of piezoelectric oxides and the etching of silicon with chlorine.

Paper Details

Date Published: 22 September 1987
PDF: 7 pages
Proc. SPIE 0801, High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics, (22 September 1987); doi: 10.1117/12.941236
Show Author Affiliations
M. Eyett, Johannes-Kepler-Universitat Linz (Austria)
R. Kullmer, Johannes-Kepler-Universitat Linz (Austria)
D. Bauerle, Johannes-Kepler-Universitat Linz (Austria)


Published in SPIE Proceedings Vol. 0801:
High Power Lasers: Sources, Laser-Material Interactions, High Excitations, and Fast Dynamics
Ernst-Wolfgang Kreutz; A. Quenzer; Dieter Schuoecker, Editor(s)

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