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Proceedings Paper

Fiber-Optic Sensors Based On Resonating Mechanical Structures
Author(s): T. S.J. Lammerink; S. J. Gerritsen
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Paper Abstract

A fiber-optic pressure sensor and a fiber-optic force sensor based on a resonating mechanical structure are developed. The accuracy and reproducibility mainly depend on the characteristics of the mechanical structure. Both structures are optically excited and the readout transducer consists of a simple optical displacement sensor, hence we have an all-optic design with its specific advantages. Further, the mechanical structure can be batch fabricated and the optic links can then be integrated with the structure. Optical transfer functions have been measured. With the proposed arrangement we obtain a signal-to-noise ratio better than 30 dB having the advantage of frequency signal transmission. The prototypes of the fiber-optic pressure sensor and the fiber-optic force sensor show the feasibility of micromechanical structures in fiber-optic sensors.

Paper Details

Date Published: 14 October 1987
PDF: 5 pages
Proc. SPIE 0798, Fiber Optic Sensors II, (14 October 1987); doi: 10.1117/12.941087
Show Author Affiliations
T. S.J. Lammerink, University Twente (The Netherlands)
S. J. Gerritsen, University Twente (The Netherlands)


Published in SPIE Proceedings Vol. 0798:
Fiber Optic Sensors II
Anna Maria Verga Scheggi, Editor(s)

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