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Proceedings Paper

Optically Excited And Interrogated Micromechanical Silicon Cantilever Structure
Author(s): H. Wolfelschneider; R. Kist; G. Knoll; S. Ramakrishnan; H. Hofflin; w. Benecke; L. Csepregi; A. Neuberger; H. Seidel
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Paper Abstract

Micromechanical silicon cantilever structures of typical dimensions 1 mm x 80 μm x 5 μm have been excited by absorption of pulsed light from diode laser at 790 nm or a LED at 830 nm respectively. The excitation motion of the cantilevers was measured by means of a fiber-optic Michelson interferometer as well as a reflective multimode fiber optic pick up. In addition to the optical signal the electrical signal of a thin film piezoresistive transducer localized at the base of the cantilever has been measured. The optimal fiber position with respect to the cantilever was determined experimentally. At this position a signal to noise ratio of about 6 could be realized for the detected signal at 5 kHz bandwidth for optical power levels of 56 pW. Using a 125 μm diameter optical fiber this corresponds to an optical power density of 4.6 mW/mm2 which is below the critical value of 5 mW/mm2 suggested for explosive environments.

Paper Details

Date Published: 14 October 1987
PDF: 6 pages
Proc. SPIE 0798, Fiber Optic Sensors II, (14 October 1987); doi: 10.1117/12.941086
Show Author Affiliations
H. Wolfelschneider, Fraunhofer-Institut fUr Physikalische MeStechnik (Germany)
R. Kist, Fraunhofer-Institut fUr Physikalische MeStechnik (Germany)
G. Knoll, Fraunhofer-Institut fUr Physikalische MeStechnik. (Germany)
S. Ramakrishnan, Fraunhofer-Institut fUr Physikalische MeStechnik (Germany)
H. Hofflin, Fraunhofer-Institut fUr Physikalische MeStechnik (Germany)
w. Benecke, Fraunhofer-Institut fUr Mikrostrukturtechnik (Germany)
L. Csepregi, Fraunhofer-Institut fUr Mikrostrukturtechnik (Germany)
A. Neuberger, Fraunhofer-Institut fUr Mikrostrukturtechnik (Germany)
H. Seidel, Fraunhofer-Institut fUr Mikrostrukturtechnik (Germany)


Published in SPIE Proceedings Vol. 0798:
Fiber Optic Sensors II
Anna Maria Verga Scheggi, Editor(s)

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