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Proceedings Paper

Photoelectron Scanning Electron Microscope (PSEM) For High Speed Noncontact Testing
Author(s): P. May; J. M. Halbout; G. Chiu
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Paper Abstract

The electron emitter in a conventional SEM is replaced by a pulsed laser/photocathode combination, resulting in a source producing electron pulses of order 1 ps in duration at a 100 Mhz repetition rate and with a peak brightness of 3 10' A/cm2.steradian. By using this instrument in the voltage contrast mode, without contact with the samples, we have been able to measure electrical pulses propagating on coplanar transmission lines with a temporal resolution of 5 ps, a voltage resolution of 3 mV/(Hz)1/2 and a spatial resolution of 0.1 Am. These measurements are achieved with extraction fields above the sample of about 1 kV/mm.

Paper Details

Date Published: 2 February 1988
PDF: 6 pages
Proc. SPIE 0795, Characterization of Very High Speed Semiconductor Devices and Integrated Circuits, (2 February 1988); doi: 10.1117/12.940943
Show Author Affiliations
P. May, IBM Thomas J. Watson Research Center (United States)
J. M. Halbout, IBM Thomas J. Watson Research Center (United States)
G. Chiu, IBM Thomas J. Watson Research Center (United States)


Published in SPIE Proceedings Vol. 0795:
Characterization of Very High Speed Semiconductor Devices and Integrated Circuits
Ravinder K. Jain, Editor(s)

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