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Proceedings Paper

Ultrahigh Speed Electron Beam Pulsing Systems For Electron Beam Testing
Author(s): John T.L. Thong; Simon C.J. Garth; William c. Nixon; Alec N. Broers
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Paper Abstract

Measurement of high speed waveforms within operating integrated circuits presents a major challenge to design engineers. Electron beam testing techniques are well suited to the task due to their essentially non-loading properties. A number of such systems are briefly reviewed and their properties and drawbacks outlined. In addition, a recently developed system is described which overcomes some of the difficulties encountered with previous implementations.

Paper Details

Date Published: 2 February 1988
PDF: 10 pages
Proc. SPIE 0795, Characterization of Very High Speed Semiconductor Devices and Integrated Circuits, (2 February 1988); doi: 10.1117/12.940941
Show Author Affiliations
John T.L. Thong, Cambridge University (England)
Simon C.J. Garth, Cambridge University (England)
William c. Nixon, Cambridge University (England)
Alec N. Broers, Cambridge University (England)


Published in SPIE Proceedings Vol. 0795:
Characterization of Very High Speed Semiconductor Devices and Integrated Circuits
Ravinder K. Jain, Editor(s)

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