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Proceedings Paper

Resonant Atr (Attenuated Total Reflection) Spectroscopy & The Nondestructive Characterization Of Multilayer Structures
Author(s): Bruno Bosacchi; Robert C. Oehrle
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Paper Abstract

We introduce the Resonant ATR technique, a new non-destructive technique for the characterization of multilayer structures in terms of the thickness and composition of the various layers. After a review of the basic principles, the technique is exemplified through its application to the layer thickness determination of wafers used in the manufacture of heterostructure lasers.

Paper Details

Date Published: 22 April 1987
PDF: 7 pages
Proc. SPIE 0794, Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices, (22 April 1987); doi: 10.1117/12.940925
Show Author Affiliations
Bruno Bosacchi, AT&T Engineering Research Center (United States)
Robert C. Oehrle, AT&T Engineering Research Center (United States)


Published in SPIE Proceedings Vol. 0794:
Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices
Orest J. Glembocki; Fred H. Pollak; Jin-Joo Song, Editor(s)

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