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Proceedings Paper

Justification For Infrared Microimaging In The Design, Manufacture, Test And Screening Of Semiconductor Microcircuits
Author(s): Robert B. McIntosh
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Paper Abstract

The applications and potential reliability and cost benefits of infrared microimaging are reviewed. Examples of cost savings are presented to help justify investment in infrared inspection technology and tools.

Paper Details

Date Published: 11 May 1987
PDF: 8 pages
Proc. SPIE 0780, Thermosense IX: Thermal Infrared Sensing for Diagnostics and Control, (11 May 1987); doi: 10.1117/12.940508
Show Author Affiliations
Robert B. McIntosh, Horizon Technology (United States)


Published in SPIE Proceedings Vol. 0780:
Thermosense IX: Thermal Infrared Sensing for Diagnostics and Control
Robert P. Madding, Editor(s)

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