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Proceedings Paper

An Analysis Procedure For Production Linewidth Data
Author(s): Michael P. C. Watts
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Paper Abstract

A hierarchical analysis of variance is combined with statistical process control to analyze production linewidth data. The analysis produces estimates of measurement errors, lot to lot variation, within lot variation, and the magnitude of the different contributions to variation. In all cases, the results from multiple lots are tested to see if the process is in "statistical control". The errors associated with centering the process, with respect to device specifications, are also calculated. The total variation of the lines is compared to the device specifications to determine process capability. An example of the analysis, with some data from the AZ Sunnyvale Applications Laboratory, is shown.

Paper Details

Date Published: 17 April 1987
PDF: 8 pages
Proc. SPIE 0775, Integrated Circuit Metrology, Inspection, & Process Control, (17 April 1987); doi: 10.1117/12.940440
Show Author Affiliations
Michael P. C. Watts, American Hoechst Corporation (United States)

Published in SPIE Proceedings Vol. 0775:
Integrated Circuit Metrology, Inspection, & Process Control
Kevin M. Monahan, Editor(s)

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