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Proceedings Paper

Rapid Recognition Of Interconnect Features
Author(s): Douglas G. Miller
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Paper Abstract

Recent advances in laser processing have reduced the capital investment required to deposit and to etch metal interconnections. Now, it is attractive to develop prototypes in the field by stocking a prefabricated CMOS circuit, and to customize it at the metallization level. The homogeneous prefabricated medium is mounted on a motorized X-Y table and moved with respect to a fixed laser beam. The pattern of metal illuminated by the focused souare beam scatters light. This scattered light conveys the form of the metal pattern in the illuminated neighborhood. Identical information is incident simultaneously on 256 different templates. Each one of these matched filters has 4x4 pixels. These 256 matched filters provide one prioritized input at 25 kHz. to a finite state controller for the X-Y table. The design of this controller will be discussed in detail. It can track polygon edges, wires which branch, and can locate open connections. Particular attention will be paid to the decomposition of the finite state machine, and to flow control within it. As each feature is recognized, its coded nature and its location are stored. The encoded table position maintains a direct registration of the laser beam to the existing metal pattern. Tracking polygons and wires generates a very compact representation for stored patterns. After further development, this recognizer will be able to support laser pattern generation in real time.

Paper Details

Date Published: 1 September 1987
PDF: 10 pages
Proc. SPIE 0774, Lasers in Microlithography, (1 September 1987); doi: 10.1117/12.940404
Show Author Affiliations
Douglas G. Miller, Villanova University (United States)

Published in SPIE Proceedings Vol. 0774:
Lasers in Microlithography
John Samuel Batchelder; Daniel J. Ehrlich; Jeff Y. Tsao, Editor(s)

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