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Proceedings Paper

Development Of Compact Synchrotron Radiation Ring For X-Ray Lithography
Author(s): Hiroshi Takada; Kouhei Furukawa; Takio Tomimasu
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Paper Abstract

The design parameters of a compact synchrotron radiation (SR)ring dedicated to industrial X-ray lithography are discussed. Further studies have been continued for making the SR ring and its injector smaller to complete a practical SR system. The Electrotechnical Laboratory and Sumitomo Electric Industries, Ltd. jointly completed a conventional compact test ring "NIJI-1 (rainbow-1 in English)" and succeeded in SR generation on February 1986. Presented here are useful results indispensable for the development of a compact SR system.

Paper Details

Date Published: 30 June 1987
PDF: 7 pages
Proc. SPIE 0773, Electron-Beam, X-Ray, and Ion-Beam Lithographies VI, (30 June 1987); doi: 10.1117/12.940379
Show Author Affiliations
Hiroshi Takada, Sumitomo Electric Industries, Ltd. (Japan)
Kouhei Furukawa, Sumitomo Electric Industries, Ltd. (Japan)
Takio Tomimasu, Electrotechnical Laboratory (Japan)

Published in SPIE Proceedings Vol. 0773:
Electron-Beam, X-Ray, and Ion-Beam Lithographies VI
Phillip D. Blais, Editor(s)

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