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Proceedings Paper

Color Laser Microscope
Author(s): D. Awamura; T. Ode; M. Yonezawa
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Paper Abstract

A color laser microscope utilizing a new color laser imaging system has been developed for the visual inspection of semiconductors. The light source, produced by three lasers (Red; He-Ne, Green; Ar, Blue; He-Cd), is deflected horizontally by an AOD (Acoustic Optical Deflector) and vertically by a vibration mirror. The laser beam is focused in a small spot which is scanned over the sample at high speed. The light reflected back from the sample is reformed to contain linear information by returning to the original vibration mirror. The linear light is guided to the CCD image sensor where it is converted into a video signal. Individual CCD image sensors are used for each of the three R, G, or B color image signals. The confocal optical system with its laser light source yields a color TV monitor image with no flaring and a much sharper resolution than that of the conventional optical microscope. The AOD makes possible a high speed laser scan and a NTSC or PAL TV video signal is produced in real time without any video memory. Since the light source is composed of R, G, and B laser beams, color separation superior to that of white light illumination is achieved. Because of the photometric linearity of the image detector, the R, G, and B outputs of the system are most suitably used for hue analysis. The CCD linear image sensors in the optical system produce no geometrical distortion, and good color registration is available principally. The output signal can be used for high accuracy line width measuring. The many features of the color laser microscope make it ideally suited for the visual inspection of semiconductor processing. A number of these systems have already been installed in such a capacity. The Color Laser Microscope can also be a very useful tool for the fields of material engineering and biotechnology.

Paper Details

Date Published: 1 April 1987
PDF: 8 pages
Proc. SPIE 0765, Imaging Sensors and Displays, (1 April 1987); doi: 10.1117/12.940184
Show Author Affiliations
D. Awamura, Lasertec Corporation (Japan)
T. Ode, Lasertec Corporation (Japan)
M. Yonezawa, Lasertec Corporation (Japan)


Published in SPIE Proceedings Vol. 0765:
Imaging Sensors and Displays
Charles Freeman, Editor(s)

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