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Proceedings Paper

Micromachined reference samples for particle counting
Author(s): David P. Taylor; William W. Hansen; Lee Steffeney; C.-T. Chu
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Paper Abstract

Three micromachined reference sample prototypes for particle counting have been fabricated by using dark ceramic spots in a transparent glass wafer to simulate particles on a surface. The direct write approach permits the spots to be positioned at random locations within an indicated area of the sample with sizes and numbers that are consistent with a distribution of particles. The goal of this work is to provide a path to creating a set of particle counting and sizing samples that can be used to establish the accuracy and precision of different measurements.

Paper Details

Date Published: 15 October 2012
PDF: 11 pages
Proc. SPIE 8492, Optical System Contamination: Effects, Measurements, and Control 2012, 84920J (15 October 2012); doi: 10.1117/12.940174
Show Author Affiliations
David P. Taylor, The Aerospace Corp. (United States)
William W. Hansen, The Aerospace Corp. (United States)
Lee Steffeney, The Aerospace Corp. (United States)
C.-T. Chu, The Aerospace Corp. (United States)


Published in SPIE Proceedings Vol. 8492:
Optical System Contamination: Effects, Measurements, and Control 2012
Sharon A. Straka; Nancy Carosso; Joanne Egges, Editor(s)

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