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Proceedings Paper

Phase Measurements With A Type 2 Microscope
Author(s): G. S. Kino; P. C.D. Hobbs; T. R. Corle
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Paper Abstract

We describe two ways which we have developed for obtaining phase information in Type 2 (confocal) microscopes: heterodyne interferometry using a Bragg cell for both scanning and frequency shifting, and a novel "heterodyne phase contrast" technique using a time-variable electro-optic phase plate, somewhat similar to a Zernike phase plate with mechanical scanning. The heterodyne interferometer can measure amplitude to 0.2% and phase to the 0.1° level at a rate of 30,000 to 50,000 points per second, with exel -lent vibration immunity. The heterodyne phase contrast system is slower, but is a single-beam system and could be retrofitted to a standard Type 2 system without affecting normal operation. If scan stage vibration can be neglected, for example in acoustic wave detection, it should be able to measure optical phase to around 0.1 millidegree; however, this accuracy is not yet demonstrated.

Paper Details

Date Published: 20 April 1987
PDF: 5 pages
Proc. SPIE 0749, Metrology: Figure and Finish, (20 April 1987); doi: 10.1117/12.939846
Show Author Affiliations
G. S. Kino, Stanford University (United States)
P. C.D. Hobbs, Stanford University (United States)
T. R. Corle, Stanford University (United States)

Published in SPIE Proceedings Vol. 0749:
Metrology: Figure and Finish
Bruce E. Truax, Editor(s)

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